Luoyang Monton Bearing Science & Technology Co.,ltd.
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What is a vacuum pump bearing?

Time: 2025-03-06 03:41:10 Source: Luoyang Monton Bearing Science & Technology Co.,ltd.

Vacuum pump bearings are the core components of vacuum equipment, which need to operate stably in harsh environments with low friction, no pollution, and high speed. The following is a professional analysis on the selection, materials, maintenance, and common problems of vacuum pump bearings:

1、 Core requirements for vacuum pump bearings
1. Oil free self-lubricating: To avoid lubricant volatilization and contamination of the vacuum environment, solid lubrication or special coatings should be used.
2. High temperature resistance: Some vacuum pumps can operate at temperatures above 200 ° C, and the materials need to be resistant to oxidation and creep.
3. Low gas release rate: Material surface treatment needs to reduce gas release and maintain vacuum degree (such as gold plating, nickel plating).
4. High speed: Common vacuum pumps have a speed of 10000-30000 RPM, and the bearings require precise dynamic balancing.

2、 Materials and Design

Material

characteristic

Application

stainless steel（SUS440C）

Corrosion resistant, medium hardness, low cost

Universal vacuum pump (such as rotary vane pump)

ceramics（Si3N4）

Ultra low friction, high temperature resistance, non-magnetic

High precision equipment such as molecular pumps and turbo pumps

titanium alloy

Lightweight and highly corrosion-resistant

Aerospace grade vacuum system


Design optimization:
Sealing structure: Non contact labyrinth seal or magnetic fluid seal is used to prevent particles from entering the bearing chamber.
Retainer: Made of polyimide (PI) or PEEK material, high temperature resistance and low gas release rate.

3、 Lubrication method

1. Solid lubrication
Molybdenum disulfide (MoS ₂) coating: Good vacuum compatibility, friction coefficient of 0.02-0.06.
Graphite coating: resistant to high temperatures (>500 ° C), suitable for extreme environments.

2. Thin film lubrication
Gold or silver film, achieved through physical vapor deposition (PVD) process to achieve nanoscale lubrication layer.

3. Self lubricating composite materials
PTFE based composite material, embedded in bearing raceway, long-term maintenance free.

4、 Selection suggestions
Match by vacuum pump type

1. Rotary vane pump: stainless steel bearings+MoS ₂ coating, cost priority.
2. Turbomolecular pump: all ceramic bearings+magnetic fluid seal, precision priority.
3. Low temperature pump: special material bearings+low-temperature bearings, suitable for extremely low temperatures.

5、 Maintenance and extended lifespan
1. Clean installation: Disassemble and install in a clean room environment to avoid particle contamination.
2. Regular monitoring: Use vibration sensors to monitor the status of bearings and perform predictive maintenance.
3. Lubrication regeneration: Remove pollutants through vacuum baking every 10000 hours to restore lubrication performance.

The selection of vacuum pump bearings should take into account the vacuum degree, speed, temperature, and cost, with priority given to material compatibility and lubrication methods. For high value-added equipment (such as semiconductor manufacturing), it is recommended to choose ceramic bearings to ensure long-term stability; Stainless steel solutions can be used in conventional industrial scenarios to reduce costs.

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